Items where Author is "Che Wan Noorakma, Abdullah"

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Conference or Workshop Item

Norliana, Yusof and Che Wan Noorakma, Abdullah and Norhayati, Soin (2014) Corner compensation mask design on (MEMS) accelerometer structure. In: 11 th IEE, 10 October 2014, Kuala Lumpur, Malaysia.

Article

Norliana, Yusof and Che Wan Noorakma, Abdullah and Norhayati, Soin (2016) Simulation study of convex corner undercutting in KOH and TMAH for a MEMS piezoresistive accelerometer. Jurnal Teknologi, 78 (6). pp. 69-76. ISSN 01279696

Che Wan Noorakma, Abdullah and Norliana, Yusof and Norhayati, Soin (2014) Corner compensation mask design on (MEMS) accelerometer structure. IEEE Xplore, 1 (1). pp. 248-251. ISSN 1466-4730

This list was generated on Fri Feb 23 18:30:39 2024 +08.